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| Structure Probe, Inc. / SPI Supplies |   | |
| 4th State, Inc. |   | ||
| Anatech LTD |   | ||
| AST Products |   | ||
| Axic Inc. |   | ||
| ESC |   | ||
| INFICON, Inc. |   | ||
| Plasma Etch Inc |   | ||
| MARCH Instruments, Inc. |   | ||
| Tegal Corp. |   | ||
| YES - Yield Engineering Systems |   | ||
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